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ADXL278 Datasheet(Arkusz danych) 7 Page - Analog Devices

Numer części ADXL278
Szczegółowy opis  Dual-Axis, High-g, MEMS Accelerometers
Pobierz  12 Pages
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Producent  AD [Analog Devices]
Strona internetowa  http://www.analog.com
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ADXL278
Rev. A | Page 7 of 12
THEORY OF OPERATION
The ADXL278 provides a fully differential sensor structure and
circuit path, resulting in the industry’s highest resistance to
EMI/RFI effects. This latest generation uses electrical feedback
with zero-force feedback for improved accuracy and stability.
The sensor resonant frequency is significantly higher than the
signal bandwidth set by the on-chip filter, avoiding the signal
analysis problems caused by resonant peaks near the signal
bandwidth.
Figure 5 is a simplified view of one of the differential sensor
elements. Each sensor includes several differential capacitor
unit cells. Each cell is composed of fixed plates attached
to the substrate and movable plates attached to the frame.
Displacement of the frame changes the differential capacitance,
which is measured by the on-chip circuitry.
Complementary 200 kHz square waves drive the fixed plates.
Electrical feedback adjusts the amplitudes of the square waves
such that the ac signal on the moving plates is 0. The feedback
signal is linearly proportional to the applied acceleration. This
unique feedback technique ensures that there is no net
electrostatic force applied to the sensor. The differential
feedback control signal is also applied to the input of the filter,
where it is filtered and converted to a single-ended signal.
UNIT
SENSING
CELL
MOVABLE
FRAME
FIXED
PLATES
UNIT
FORCING
CELL
ANCHOR
MOVING
PLATE
PLATE
CAPACITORS
ANCHOR
Figure 5. Simplified View of Sensor Under Acceleration




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