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ADXL323KCPZ Datasheet(Arkusz danych) 11 Page - Analog Devices

Numer części ADXL323KCPZ
Szczegółowy opis  Small, Low Power, 2-Axis ±3 g i MEMS Accelerometer
Pobierz  16 Pages
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Producent  AD [Analog Devices]
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Rev. 0 | Page 11 of 16
The ADXL323 is a complete 2-axis acceleration measurement
system on a single, monolithic IC. The ADXL323 has a measure-
ment range of ±3 g minimum. It contains a polysilicon surface
micromachined sensor and signal conditioning circuitry to
implement an open-loop acceleration measurement architecture.
The output signals are analog voltages that are proportional to
acceleration. The accelerometer can measure the static accelera-
tion of gravity in tilt sensing applications, as well as dynamic
acceleration resulting from motion, shock, or vibration.
The sensor is a polysilicon surface micromachined structure
built on top of a silicon wafer. Polysilicon springs suspend the
structure over the surface of the wafer and provide a resistance
against acceleration forces. Deflection of the structure is meas-
ured using a differential capacitor that consists of independent
fixed plates and plates attached to the moving mass. The fixed
plates are driven by 180° out-of-phase square waves. Acceleration
deflects the moving mass and unbalances the differential
capacitor resulting in a sensor output whose amplitude is
proportional to acceleration. Phase-sensitive demodulation
techniques are then used to determine the magnitude and
direction of the acceleration.
The demodulator output is amplified and brought off-chip
through a 32 kΩ resistor. The user then sets the signal band-
width of the device by adding a capacitor. This filtering improves
measurement resolution and helps prevent aliasing.
The ADXL323 uses a single structure for sensing the X-axis and
Y-axis. As a result, the sense directions of the two axes are
highly orthogonal with little cross axis sensitivity. Mechanical
misalignment of the sensor die to the package is the chief
source of cross axis sensitivity. Mechanical misalignment can, of
course, be calibrated out at the system level.
Rather than using additional temperature compensation
circuitry, innovative design techniques ensure that high
performance is built in to the ADXL323. As a result, there is
neither quantization error nor nonmonotonic behavior, and
temperature hysteresis is very low (typically less than 3 mg over
the −25°C to +70°C temperature range).
Figure 13 and Figure 16 show the zero g output performance of
eight parts (X-axis and Y-axis) soldered to a PCB over a −25°C
to +70°C temperature range.
Figure 25 and Figure 28 demonstrate the typical sensitivity shift
over temperature for supply voltages of 3 V. This is typically
better than ±1% over the −25°C to +70°C temperature range.

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