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ADXL001-250 Datasheet(Arkusz danych) 7 Page - Analog Devices

Numer części ADXL001-250
Szczegółowy opis  High Performance Wide Bandwidth Accelerometer
Pobierz  10 Pages
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Producent  AD [Analog Devices]
Strona internetowa  http://www.analog.com
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 7 page
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Preliminary Technical Data
ADXL001
This information applies to an ongoing development. Its characteristics and specifications are subject to change without notice.
Analog Devices assumes no obligation regarding future manufacturing unless otherwise agreed to in writing. Patents pending.
Rev. PrA | Page 7 of 10
THEORY OF OPERATION
DESIGN PRINCIPLES
The ADXL001 accelerometer provides a fully differential sensor
structure and circuit path for excellent resistance to EMI/RFI
interference.
This latest generation SOIMEMS device takes advantage of
mechanically coupled but electrically isolated differential
sensing cells. This improves sensor performance and size as a
single proof mass generates the fully differential signal. The
sensor signal conditioning also uses electrical feedback with
zero-force feedback for improved accuracy and stability. This
force-feedback cancels out the electrostatic forces contributed
by the sensor circuitry.
Figure 5 is a simplified view of one of the differential sensor cell
blocks. Each sensor block includes several differential capacitor
unit cells. Each cell is composed of fixed plates attached to the
device layer and movable plates attached to the sensor frame.
Displacement of the sensor frame changes the differential
capacitance. On-chip circuitry measures the capacitive change.
MECHANICAL SENSOR
The ADXL001 is built using the Analog Devices, Inc., SOIMEMS
sensor process. The sensor device is micromachined in-plane
in the SOI device layer. Trench isolation is used to electrically
isolate, but mechanically couple, the differential sensing ele-
ments. Single-crystal silicon springs suspend the structure over
the handle wafer and provide resistance against acceleration forces.
UNIT
SENSING
CELL
MOVABLE
FRAME
FIXED
PLATES
UNIT
FORCING
CELL
ANCHOR
MOVING
PLATE
PLATE
CAPACITORS
ANCHOR
Figure 5. Simplified View of Sensor Under Acceleration




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