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ADXL335 Datasheet(Arkusz danych) 6 Page - Analog Devices

Numer części ADXL335
Szczegółowy opis  Small, Low Power, 3-Axis ±3 g Accelerometer
Pobierz  11 Pages
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Producent  AD [Analog Devices]
Strona internetowa  http://www.analog.com
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ADXL335
Preliminary Technical Data
Rev. PrA | Page 6 of 11
THEORY OF OPERATION
The ADXL335 is a complete 3-axis acceleration measurement
system. The ADXL335 has a measurement range of ±3 g
minimum. It contains a polysilicon surface micromachined
sensor and signal conditioning circuitry to implement an open-
loop acceleration measurement architecture. The output signals
are analog voltages that are proportional to acceleration. The
accelerometer can measure the static acceleration of gravity in
tilt sensing applications as well as dynamic acceleration
resulting from motion, shock, or vibration.
The sensor is a polysilicon surface micromachined structure
built on top of a silicon wafer. Polysilicon springs suspend the
structure over the surface of the wafer and provide a resistance
against acceleration forces. Deflection of the structure is meas-
ured using a differential capacitor that consists of independent
fixed plates and plates attached to the moving mass. The fixed
plates are driven by 180° out-of-phase square waves. Acceleration
deflects the moving mass and unbalances the differential
capacitor resulting in a sensor output whose amplitude is
proportional to acceleration. Phase-sensitive demodulation
techniques are then used to determine the magnitude and
direction of the acceleration.
The demodulator output is amplified and brought off-chip
through a 32 kΩ resistor. The user then sets the signal band-
width of the device by adding a capacitor. This filtering improves
measurement resolution and helps prevent aliasing.
MECHANICAL SENSOR
The ADXL335 uses a single structure for sensing the X, Y, and
Z axes. As a result, the three axes sense directions are highly
orthogonal with little cross axis sensitivity. Mechanical mis-
alignment of the sensor die to the package is the chief source
of cross axis sensitivity. Mechanical misalignment can, of
course, be calibrated out at the system level.
PERFORMANCE
Rather than using additional temperature compensation
circuitry, innovative design techniques ensure high
performance is built-in to the ADXL335. As a result, there is
neither quantization error nor nonmonotonic behavior, and
temperature hysteresis is very low (typically less than 3 mg over
the −25°C to +70°C temperature range).




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