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ADXL325BCPZ Datasheet(Arkusz danych) 10 Page - Analog Devices

Numer części ADXL325BCPZ
Szczegółowy opis  Small, Low Power, 3-Axis ±5 g Accelerometer
Pobierz  16 Pages
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Producent  AD [Analog Devices]
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The ADXL325 is a complete 3-axis acceleration measurement
system. The ADXL325 has a measurement range of ±5 g
minimum. It contains a polysilicon surface micromachined
sensor and signal conditioning circuitry to implement an open-
loop acceleration measurement architecture. The output signals
are analog voltages that are proportional to acceleration. The
accelerometer can measure the static acceleration of gravity in
tilt-sensing applications, as well as dynamic acceleration, resulting
from motion, shock, or vibration.
The sensor is a polysilicon surface micromachined structure
built on top of a silicon wafer. Polysilicon springs suspend the
structure over the surface of the wafer and provide a resistance
against acceleration forces. Deflection of the structure is measured
using a differential capacitor that consists of independent fixed
plates and plates attached to the moving mass. The fixed plates
are driven by 180° out-of-phase square waves. Acceleration deflects
the moving mass and unbalances the differential capacitor resulting
in a sensor output whose amplitude is proportional to acceleration.
Phase-sensitive demodulation techniques are then used to determine
the magnitude and direction of the acceleration.
The demodulator output is amplified and brought off-chip through
a 32 kΩ resistor. The user then sets the signal bandwidth of the
device by adding a capacitor. This filtering improves measurement
resolution and helps prevent aliasing.
The ADXL325 uses a single structure for sensing the X, Y, and Z axes.
As a result, the three axes sense directions are highly orthogonal
with little cross-axis sensitivity. Mechanical misalignment of the
sensor die to the package is the chief source of cross-axis sensitivity.
Mechanical misalignment can, of course, be calibrated out at
the system level.
Rather than using additional temperature compensation circuitry,
innovative design techniques ensure that high performance is
built-in to the ADXL325. As a result, there is neither quantization
error nor nonmonotonic behavior, and temperature hysteresis is
very low (typically <3 mg over the −25°C to +70°C temperature

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