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ADXL326BCPZ Datasheet(Arkusz danych) 10 Page - Analog Devices

Numer części ADXL326BCPZ
Szczegółowy opis  Small, Low Power, 3-Axis ±16 g Accelerometer
Pobierz  16 Pages
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Producent  AD [Analog Devices]
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The ADXL326 is a complete 3-axis acceleration measurement
system. The ADXL326 has a measurement range of ±16 g
minimum. It contains a polysilicon surface micromachined
sensor and signal conditioning circuitry to implement an open-
loop acceleration measurement architecture. The output signals
are analog voltages that are proportional to acceleration. The
accelerometer can measure the static acceleration of gravity in
tilt sensing applications, as well as dynamic acceleration, resulting
from motion, shock, or vibration.
The sensor is a polysilicon surface micromachined structure
built on top of a silicon wafer. Polysilicon springs suspend the
structure over the surface of the wafer and provide a resistance
against acceleration forces. Deflection of the structure is measured
using a differential capacitor that consists of independent fixed
plates and plates attached to the moving mass. The fixed plates
are driven by 180° out-of-phase square waves. Acceleration deflects
the moving mass and unbalances the differential capacitor resulting
in a sensor output whose amplitude is proportional to acceleration.
Phase-sensitive demodulation techniques are then used to
determine the magnitude and direction of the acceleration.
The demodulator output is amplified and brought off-chip through
a 32 kΩ resistor. The user then sets the signal bandwidth of the
device by adding a capacitor. This filtering improves measurement
resolution and helps prevent aliasing.
The ADXL326 uses a single structure for sensing the X, Y, and Z axes.
As a result, the three axes sense directions are highly orthogonal
with little cross-axis sensitivity. Mechanical misalignment of the
sensor die to the package is the chief source of cross-axis sensitivity.
Mechanical misalignment can, of course, be calibrated out at
the system level.
Rather than using additional temperature compensation circuitry,
innovative design techniques ensure that high performance is built-
in to the ADXL326. As a result, there is neither quantization error
nor nonmonotonic behavior, and temperature hysteresis is very
low (typically <3 mg over the −25°C to +70°C temperature range).

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