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ADXL377 Datasheet(Arkusz danych) 7 Page - Analog Devices

Numer części ADXL377
Szczegółowy opis  3-Axis ±200 g Analog MEMS
Pobierz  13 Pages
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Producent  AD [Analog Devices]
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Preliminary Technical Data
Rev. PrB | Page 7 of 13
The ADXL377 is a complete 3-axis acceleration measurement
system. The ADXL377 has a measurement range of ±200 g
minimum. It contains a polysilicon surface micromachined sensor
and signal conditioning circuitry to implement an open-loop
acceleration measurement architecture. The output signals are
analog voltages that are proportional to acceleration. The
accelerometer can measure the static acceleration of gravity in tilt-
sensing applications as well as dynamic acceleration resulting
from motion, shock, or vibration. The accelerometer is
designed to measure dynamic acceleration resulting from high
impact events without output saturation.
The sensor is a polysilicon surface micromachined structure
built on top of a silicon wafer. Polysilicon springs suspend the
structure over the surface of the wafer and provide a resistance
against acceleration forces. Deflection of the structure is measured
using a differential capacitor that consists of independent fixed
plates and plates attached to the moving mass. The fixed plates
are driven by 180° out-of-phase square waves. Acceleration deflects
the moving mass and unbalances the differential capacitor resulting
in a sensor output whose amplitude is proportional to acceleration.
Phase-sensitive demodulation techniques are then used to
determine the magnitude and direction of the acceleration.
The demodulator output is amplified and brought off chip
through a 32 kΩ resistor. The user then sets the signal bandwidth
(BW) of the device by adding a capacitor. This filtering improves
measurement resolution and helps prevent aliasing.
The ADXL377 uses a single structure for sensing the X, Y, and Z axes.
As a result, the three axes sense directions are highly orthogonal
with little cross-axis sensitivity. Mechanical misalignment of the
sensor die to the package is the chief source of cross-axis sensitivity.
Mechanical misalignment can be calibrated out at the system level.
Rather than using additional temperature compensation circuitry,
innovative design techniques ensure that high performance is built
into the ADXL377. As a result, there is neither quantization error
nor nonmonotonic behavior, and temperature hysteresis is very low
(typically less than 30 mg over the −25°C to +85°C temperature

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