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ADXL335_10 Datasheet(Arkusz danych) 10 Page - Analog Devices

Numer części ADXL335_10
Szczegółowy opis  Small, Low Power, 3-Axis ±3 g Accelerometer
Pobierz  16 Pages
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Producent  AD [Analog Devices]
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Rev. B | Page 10 of 16
The ADXL335 is a complete 3-axis acceleration measurement
system. The ADXL335 has a measurement range of ±3 g mini-
mum. It contains a polysilicon surface-micromachined sensor
and signal conditioning circuitry to implement an open-loop
acceleration measurement architecture. The output signals are
analog voltages that are proportional to acceleration. The
accelerometer can measure the static acceleration of gravity
in tilt-sensing applications as well as dynamic acceleration
resulting from motion, shock, or vibration.
The sensor is a polysilicon surface-micromachined structure
built on top of a silicon wafer. Polysilicon springs suspend the
structure over the surface of the wafer and provide a resistance
against acceleration forces. Deflection of the structure is meas-
ured using a differential capacitor that consists of independent
fixed plates and plates attached to the moving mass. The fixed
plates are driven by 180° out-of-phase square waves. Acceleration
deflects the moving mass and unbalances the differential capacitor
resulting in a sensor output whose amplitude is proportional to
acceleration. Phase-sensitive demodulation techniques are then
used to determine the magnitude and direction of the
The demodulator output is amplified and brought off-chip
through a 32 kΩ resistor. The user then sets the signal
bandwidth of the device by adding a capacitor. This filtering
improves measurement resolution and helps prevent aliasing.
The ADXL335 uses a single structure for sensing the X, Y, and
Z axes. As a result, the three axes’ sense directions are highly
orthogonal and have little cross-axis sensitivity. Mechanical
misalignment of the sensor die to the package is the chief
source of cross-axis sensitivity. Mechanical misalignment
can, of course, be calibrated out at the system level.
Rather than using additional temperature compensation circui-
try, innovative design techniques ensure that high performance
is built in to the ADXL335. As a result, there is no quantization
error or nonmonotonic behavior, and temperature hysteresis
is very low (typically less than 3 mg over the −25°C to +70°C
temperature range).

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