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ADXL103WCEZB-REEL Arkusz danych(PDF) 13 Page - Analog Devices |
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ADXL103WCEZB-REEL Arkusz danych(HTML) 13 Page - Analog Devices |
13 / 16 page Data Sheet ADXL103/ADXL203 Rev. D | Page 13 of 16 THEORY OF OPERATION The ADXL103/ADXL203 are complete acceleration measurement systems on a single, monolithic IC. The ADXL103 is a single- axis accelerometer, and the ADXL203 is a dual-axis accelerometer. Both parts contain a polysilicon surface-micro-machined sensor and signal conditioning circuitry to implement an open-loop acceleration measurement architecture. The output signals are analog voltages that are proportional to acceleration. The ADXL103/ADXL203 are capable of measuring both positive and negative accelerations from ±1.7 g to at least ±18 g. The accelerometer can measure static acceleration forces, such as gravity, allowing it to be used as a tilt sensor. The sensor is a surface-micromachined polysilicon structure built on top of the silicon wafer. Polysilicon springs suspend the structure over the surface of the wafer and provide a resistance against acceleration forces. Deflection of the structure is measured using a differential capacitor that consists of independent fixed plates and plates attached to the moving mass. The fixed plates are driven by 180° out-of-phase square waves. Acceleration deflects the beam and unbalances the differential capacitor, resulting in an output square wave whose amplitude is proportional to acceleration. Phase-sensitive demodulation techniques are then used to rectify the signal and determine the direction of the acceleration. The output of the demodulator is amplified and brought off-chip through a 32 kΩ resistor. At this point, the user can set the signal bandwidth of the device by adding a capacitor. This filtering improves measurement resolution and helps prevent aliasing. PERFORMANCE Rather than using additional temperature compensation circuitry, innovative design techniques have been used to ensure that high performance is built in. As a result, there is essentially no quantization error or nonmonotonic behavior, and temperature hysteresis is very low (typically less than 10 mg over the −40°C to +125°C temperature range). Figure 11 shows the 0 g output performance of eight parts (x and y axes) over a −40°C to +125°C temperature range. Figure 13 demonstrates the typical sensitivity shift over temperature for VS = 5 V. Sensitivity stability is optimized for VS = 5 V but is still very good over the specified range; it is typically better than ±1% over temperature at VS = 3 V. EARTH’S SURFACE TOP VIEW (Not to Scale) XOUT = 0g YOUT = 0g PIN 8 XOUT = –1g YOUT = 0g PIN 8 XOUT = +1g YOUT = 0g PIN 8 XOUT = 0g YOUT = +1g PIN 8 XOUT = 0g YOUT = –1g Figure 39. Output Response vs. Orientation |
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