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ADXL322_15 Datasheet(Arkusz danych) 11 Page - Analog Devices

Numer części ADXL322_15
Szczegółowy opis  Small and Thin 2 g Accelerometer
Pobierz  16 Pages
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Producent  AD [Analog Devices]
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The ADXL322 is a complete acceleration measurement system
on a single monolithic IC. The ADXL322 has a measurement
range of ±2 g. It contains a polysilicon surface micromachined
sensor and signal conditioning circuitry to implement an open-
loop acceleration measurement architecture. The output signals
are analog voltages that are proportional to acceleration. The
accelerometer measures static acceleration forces, such as
gravity, which allows it to be used as a tilt sensor.
The sensor is a polysilicon surface-micromachined structure
built on top of a silicon wafer. Polysilicon springs suspend the
structure over the surface of the wafer and provide a resistance
against acceleration forces. Deflection of the structure is
measured using a differential capacitor that consists of inde-
pendent fixed plates and plates attached to the moving mass.
The fixed plates are driven by 180° out-of-phase square waves.
Acceleration deflects the beam and unbalances the differential
capacitor, resulting in an output square wave whose amplitude
is proportional to acceleration. Phase-sensitive demodulation
techniques are then used to rectify the signal and determine
the direction of the acceleration.
The demodulator’s output is amplified and brought off-
chip through a 32 kΩ resistor. The user then sets the signal
bandwidth of the device by adding a capacitor. This filtering
improves measurement resolution and helps prevent aliasing.
Rather than using additional temperature compensation
circuitry, innovative design techniques were used to ensure
built-in high performance. As a result, there is neither quanti-
zation error nor nonmonotonic behavior, and temperature
hysteresis is very low (typically less than 5 mg over the −20°C
to +70°C temperature range).
Figure 11 shows the zero g output performance of eight parts
(X- and Y-axis) over a −20°C to +70°C temperature range.
Figure 14 demonstrates the typical sensitivity shift over tem-
perature for supply voltages of 3 V. This is typically better than
±1% over the −20°C to +70°C temperature range.

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