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ADXL316WBCSZ-RL7 Datasheet(Arkusz danych) 10 Page - Analog Devices

Numer części ADXL316WBCSZ-RL7
Szczegółowy opis  Small, Low Power, 3-Axis plus minus16 g Accelerometer
Pobierz  14 Pages
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Producent  AD [Analog Devices]
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Data Sheet
Rev. 0 | Page 10 of 14
The ADXL316 is a complete 3-axis acceleration measurement
system. The ADXL316 has a measurement range of ±16 g
minimum. It contains a polysilicon surface micromachined
sensor and signal conditioning circuitry to implement an open-
loop acceleration measurement architecture. The output signals
are analog voltages that are proportional to acceleration. The
accelerometer can measure the static acceleration of gravity in
tilt sensing applications as well as dynamic acceleration resulting
from motion, shock, or vibration.
The sensor is a polysilicon surface micromachined structure
built on top of a silicon wafer. Polysilicon springs suspend the
structure over the surface of the wafer and provide a resistance
against acceleration forces. Deflection of the structure is measured
using a differential capacitor that consists of independent fixed
plates and plates attached to the moving mass. The fixed plates
are driven by 180° out-of-phase square waves. Acceleration
deflects the moving mass and unbalances the differential
capacitor, resulting in a sensor output with an amplitude
proportional to acceleration. Phase-sensitive demodulation
techniques determine the magnitude and direction of the
A 32 kΩ resistor can amplify and bring the demodulator output
off-chip. The user then sets the signal bandwidth of the device
by adding a capacitor. This filtering improves measurement
resolution and helps prevent aliasing.
The ADXL316 uses a single structure for sensing the X-, Y-, and
Z-axes. As a result, the three axes sense directions are highly
orthogonal with minimal cross axis sensitivity. Mechanical
misalignment of the sensor die to the package is the chief source
of cross axis sensitivity. Mechanical misalignment can be calibrated
out at the system level.
Rather than using additional temperature compensation circuitry,
innovative design techniques ensure high performance is built-in
to the ADXL316. As a result, there is neither quantization error nor
nonmonotonic behavior, and temperature hysteresis is very low.

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